ECE141A,ME141A - Introduction to Nanoelectromechanical and Microelectromechanical systems (NEMS/MEMS)

Units: 3

Instructor(s): Foster


Introduction to nano- and microtechnology. Scaling laws and nanoscale physics are stressed. Individual subjects at the nanoscale including materials, mechanics, photonics, electronics, and fluidics will be described, with an emphasis on differences of behavior at the nanoscale and real-world examples.