Novel sensing scheme for the displacement of electrostatically actuated microcantilevers

TitleNovel sensing scheme for the displacement of electrostatically actuated microcantilevers
Publication TypeConference Paper
Year of Publication2005
AuthorsBamieh B, Turner K, Napoli M, Olroyd C
Conference NamePROCEEDINGS OF THE AMERICAN CONTROL CONFERENCE
PublisherIEEE