A capacitive microcantilever: Modelling, validation, and estimation using current measurements

TitleA capacitive microcantilever: Modelling, validation, and estimation using current measurements
Publication TypeJournal Article
Year of Publication2004
AuthorsBamieh B, Turner K, Napoli M
JournalJOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME
Volume126
Pagination319-326
Date PublishedJUN