Title | A capacitive microcantilever: Modelling, validation, and estimation using current measurements |
Publication Type | Journal Article |
Year of Publication | 2004 |
Authors | Bamieh B, Turner K, Napoli M |
Journal | JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME |
Volume | 126 |
Pagination | 319-326 |
Date Published | JUN |