A NEW METHOD FOR RESONANT SENSING BASED ON NOISE IN NONLINEAR MEMS

TitleA NEW METHOD FOR RESONANT SENSING BASED ON NOISE IN NONLINEAR MEMS
Publication TypeConference Paper
Year of Publication2012
AuthorsBurgner C.B, Turner K.L, Shaw L.A
Conference NameProceedings IEEE Micro Electro Mechanical Systems
PublisherIEEE