| Title | Development of gallium nitride-based MEMS structures |
| Publication Type | Conference Paper |
| Year of Publication | 2003 |
| Authors | Hu EL, Stonas AR, DenBaars SP, Turner KL |
| Publisher | IEEE |
| Title | Development of gallium nitride-based MEMS structures |
| Publication Type | Conference Paper |
| Year of Publication | 2003 |
| Authors | Hu EL, Stonas AR, DenBaars SP, Turner KL |
| Publisher | IEEE |