Fabrication and testing of beam supported AlNFBARs

TitleFabrication and testing of beam supported AlNFBARs
Publication TypeConference Paper
Year of Publication2005
AuthorsLughi V, Callaghan LA, Requa MV, Clarke DR, MacDonald NC, Turner KL
Conference NamePROCEEDINGS OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM