Title | Pressure-dependent damping characteristics of micro silicon beam resonators for different resonant modes |
Publication Type | Conference Paper |
Year of Publication | 2005 |
Authors | Zhang WB, Turner KL |
Conference Name | IEEE Sensors |
Publisher | IEEE |
Title | Pressure-dependent damping characteristics of micro silicon beam resonators for different resonant modes |
Publication Type | Conference Paper |
Year of Publication | 2005 |
Authors | Zhang WB, Turner KL |
Conference Name | IEEE Sensors |
Publisher | IEEE |