| Title | Photoelectrochemical undercut etching for fabrication of GaN microelectromechanical systems |
| Publication Type | Journal Article |
| Year of Publication | 2001 |
| Authors | Hu EL, Stonas AR, DenBaars SP, MacDonald NC, Turner KL |
| Journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B |
| Volume | 19 |
| Pagination | 2838-2841 |
| Date Published | NOV-DEC |