Photoelectrochemical undercut etching for fabrication of GaN microelectromechanical systems

TitlePhotoelectrochemical undercut etching for fabrication of GaN microelectromechanical systems
Publication TypeJournal Article
Year of Publication2001
AuthorsHu EL, Stonas AR, DenBaars SP, MacDonald NC, Turner KL
JournalJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume19
Pagination2838-2841
Date PublishedNOV-DEC