Title | The nonlinear response of resonant microbeam systems with purely-parametric electrostatic actuation |
Publication Type | Journal Article |
Year of Publication | 2006 |
Authors | Shaw SW, Turner KL, Rhoads JF |
Journal | JOURNAL OF MICROMECHANICS AND MICROENGINEERING |
Volume | 16 |
Pagination | 890-899 |
Date Published | MAY |