The nonlinear response of resonant microbeam systems with purely-parametric electrostatic actuation

TitleThe nonlinear response of resonant microbeam systems with purely-parametric electrostatic actuation
Publication TypeJournal Article
Year of Publication2006
AuthorsShaw SW, Turner KL, Rhoads JF
JournalJOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume16
Pagination890-899
Date PublishedMAY