| Title | A COMPARISON OF THE OPTICAL PROJECTION LITHOGRAPHY SIMULATORS IN SAMPLE AND PROLITH |
| Publication Type | Journal Article |
| Year of Publication | 1992 |
| Authors | , MELLICHAMP DA, CRISALLE OD, SEBORG DE |
| Journal | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING |
| Volume | 5 |
| Pagination | 14-26 |
| Date Published | FEB |