| Title | ADAPTIVE-CONTROL OF PHOTOLITHOGRAPHY |
| Publication Type | Journal Article |
| Year of Publication | 1992 |
| Authors | SEBORG DE, CRISALLE OD, SOPER RA, MELLICHAMP DA |
| Journal | AICHE JOURNAL |
| Volume | 38 |
| Pagination | 1-14 |
| Date Published | JAN |
| Title | ADAPTIVE-CONTROL OF PHOTOLITHOGRAPHY |
| Publication Type | Journal Article |
| Year of Publication | 1992 |
| Authors | SEBORG DE, CRISALLE OD, SOPER RA, MELLICHAMP DA |
| Journal | AICHE JOURNAL |
| Volume | 38 |
| Pagination | 1-14 |
| Date Published | JAN |